semiconductor Archives - Particle Measuring Systems

Aerosol Particle Monitoring Inside of Semiconductor Process Tools

Claudia Semczuk — Fri, 22 Dec 2023 17:26:43 +0000

This blog explores the pivotal role of real-time aerosol particle monitoring in semiconductor manufacturing, specifically focusing on the innovative solution provided by Particle Measuring Systems'

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Lithography Defects Caused by AMC (Airborne Molecular Contamination) in the Functional Area

Nina Morton — Wed, 05 May 2021 15:00:36 +0000

There is a need for more control of deleterious environmental contamination, including better detection and real-time response to undesired AMC concentration levels, the most prevalent of which are the amines class of AMCs.

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Semiconductor Particle Contamination Control

Nina Morton — Wed, 14 Apr 2021 15:00:43 +0000

Wet process equipment contains many components that are potential sources of particle contamination, and the ability to troubleshoot highly contaminating components in real-time without the need for offline laboratory analysis offers a significant benefit to equipment manufacturers.

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CASE STUDY: Photomask Particle Testing Case Study

Nina Morton — Wed, 07 Apr 2021 15:00:48 +0000

Data from the Chem 20™ Chemical Particle Counter can inform manufacturers on the benefit of strategic filtration systems. In this blog, we look at cleaning systems for ultrapure water and potassium hydroxide.

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Filter Cleanliness Testing Using a 20 nm Particle Counter

Nina Morton — Wed, 31 Mar 2021 15:00:09 +0000

Real-time data provided by the Chem 20 allows the user to evaluate the actual performance of their particle filters. For older filters, the Chem 20 can be used to determine whether the filter is still performing satisfactorily, or if it needs replacement.

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Checking Chemical Particle Cleanliness of Incoming Deliveries

Nina Morton — Wed, 10 Mar 2021 15:00:17 +0000

When receiving deliveries of high-purity process chemicals from the chemical supplier, semiconductor manufacturers will often check particle measurements to verify the chemical is sufficiently clean before accepting it into their facility. If they don't, their filtration system might not adequately clean it of impurities, even after repeated circulation.

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Controlling Contamination in Chemical Supply

Nina Morton — Wed, 03 Mar 2021 15:00:31 +0000

As the critical particle size for semiconductor devices continues to shrink, the purity of the process chemicals used in their manufacture becomes increasingly important. Chemical suppliers will use a variety of techniques, including filtration, distillation, and ion exchange, to achieve the lowest possible particle contamination levels in their product.

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Controlling Contamination in High-Purity Chemicals

Nina Morton — Wed, 24 Feb 2021 15:00:23 +0000

The critical particle size for today’s leading-edge semiconductor technology is shrinking. Now in the sub-10 nm size-range, the control and mitigation of potentially yield-impacting particles is growing more important. Here, we'll discuss how the Chem 20™ Chemical Particle Counter's industry-leading sensitivity can be applied to a variety of applications, including...

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