20 nm Archives - Particle Measuring Systems

BLOG: What is Syringe Sampling?

Nina Morton — Thu, 01 Sep 2022 11:11:21 +0000

Welcome to the world of liquid particle counting and syringe sampling… If you’re new to liquid particle counting, you might not know anything about how we know if liquids are clean. One method to determine a liquid’s cleanliness is syringe sampling. Intro A syringe sampler represents the simplest delivery system for precisely...

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Semiconductor Particle Contamination Control

Nina Morton — Wed, 14 Apr 2021 15:00:43 +0000

Wet process equipment contains many components that are potential sources of particle contamination, and the ability to troubleshoot highly contaminating components in real-time without the need for offline laboratory analysis offers a significant benefit to equipment manufacturers.

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CASE STUDY: Photomask Particle Testing Case Study

Nina Morton — Wed, 07 Apr 2021 15:00:48 +0000

Data from the Chem 20™ Chemical Particle Counter can inform manufacturers on the benefit of strategic filtration systems. In this blog, we look at cleaning systems for ultrapure water and potassium hydroxide.

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Filter Cleanliness Testing Using a 20 nm Particle Counter

Nina Morton — Wed, 31 Mar 2021 15:00:09 +0000

Real-time data provided by the Chem 20 allows the user to evaluate the actual performance of their particle filters. For older filters, the Chem 20 can be used to determine whether the filter is still performing satisfactorily, or if it needs replacement.

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Filter Contamination Testing with the Chem 20 Particle Counter

Nina Morton — Wed, 24 Mar 2021 15:00:34 +0000

The Chem 20 was placed inline with a dedicated filter-wetting machine used by a semiconductor manufacturer to study the effect of wetting and flushing new particle filters before they are used in production.

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Controlling Particle Contamination in Chemical Distribution

Nina Morton — Wed, 17 Mar 2021 15:00:54 +0000

Chemical distribution modules control the supply of ultrapure process chemicals to the point of use. The chemical shouldn't contain yield-threatening particle contamination here due to contact with wafers, masks, and other critical surfaces.

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Checking Chemical Particle Cleanliness of Incoming Deliveries

Nina Morton — Wed, 10 Mar 2021 15:00:17 +0000

When receiving deliveries of high-purity process chemicals from the chemical supplier, semiconductor manufacturers will often check particle measurements to verify the chemical is sufficiently clean before accepting it into their facility. If they don't, their filtration system might not adequately clean it of impurities, even after repeated circulation.

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Controlling Contamination in Chemical Supply

Nina Morton — Wed, 03 Mar 2021 15:00:31 +0000

As the critical particle size for semiconductor devices continues to shrink, the purity of the process chemicals used in their manufacture becomes increasingly important. Chemical suppliers will use a variety of techniques, including filtration, distillation, and ion exchange, to achieve the lowest possible particle contamination levels in their product.

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Controlling Contamination in High-Purity Chemicals

Nina Morton — Wed, 24 Feb 2021 15:00:23 +0000

The critical particle size for today’s leading-edge semiconductor technology is shrinking. Now in the sub-10 nm size-range, the control and mitigation of potentially yield-impacting particles is growing more important. Here, we'll discuss how the Chem 20™ Chemical Particle Counter's industry-leading sensitivity can be applied to a variety of applications, including...

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Particle Counting to 20 nm with the SLS-20 Chemical Batch Sampler

Nina Morton — Wed, 17 Feb 2021 15:30:58 +0000

In this blog series, we introduce the most sensitive system for detecting contamination in microelectronic applications. Through several rigorous studies, we demonstrate the veracity and reliability of data collection for various process chemicals.

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